MF216600 - SEMI MF2166 - Practices for Monitoring Non-Contact Dielectric Characterization Systems Through Use of Special Reference Wafers Revision:SEMI MF2166-02 - Superseded or other functionality that is

or other functionality that is unique to a class (etchers

while the equipment is required to provide the services for the substrate information management

1  This Specification applies to 6

and SEMI F75

本基準欲提供半導體工業特定安全標籤之國際統一格式。

MF216600 - SEMI MF2166 - Practices for Monitoring Non-Contact Dielectric Characterization Systems Through Use of Special Reference Wafers Revision:SEMI MF2166-02 - Superseded or other functionality that isThis standard was originally published by ASTM International as ASTM F2166 02. It was formally approved by ASTM balloting procedures and adhered to ASTM patent requirements. Though ownership of this standard has been transferred to SEMI, it has not been formally approved by SEMI balloting procedures and does not adhere either to SEMI Regulations dealing with patents or to SEMI Editorial Guidelines. Available at www. semi. org October 2003, to be