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This Guide addresses the testing and prequalification of high purity polymer materials used in UPW system equipment and distribution
SEMI E116-0703 (technical revision)
This Practice covers the analysis of the crystallographic perfection in silicon ingots
This Guide covers the steps to be taken to generate a set of ConRefs for a specific property or family of related properties required in semiconductor technology
SEMI E125-0703 (first published)
M06600 - SEMI M66 - MISフラットバンド電圧―絶縁膜厚法を使った，酸化膜，およびhigh-κゲートスタックの有効仕事関数の算出方法 StdPbc-1113 This Guide addresses the testingglobal Silicon Wafer Committee2006516global Audits and Reviews Subcommittee20066www. semi. org20067CD ROM E 20072 R2 2. 3 CMOSInternational Technology Roadmap for Semiconductors1nmSiO2 CMOSn+ p+ SiO2SiO2high Referenced SEMI Standards SEMI M59 Terminology for Silicon Technology SEMI MF1153 Test Method for Characterization of Metal Oxide Silicon (MOS) Structures by Capacitance Voltage Measurements