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INAA is an NAA where the analysis is conducted directly on the irradiated samples
Health & Safety Global Technical Committee
This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5
SEMI E22-0697 (Reapproved 1102)
2 SIMS can measure the boron contamination in heavily-doped n-type substrates
G03400 - SEMI G34 - Specification for Cer-Pack Package Constructions, Including Leadframes, Suitable for Automated Assembly by End Users StdPbc-0314 INAA is an NAA whereThis specification defines the standard requirements for Cer Pack package construction intended for automated assembly to printed wiring boards. Acceptance criteria for package constructions, including leadframes, are included. Referenced SEMI Standards None.
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