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chemically unreactive
SEMI文書，特にSEMI P35から構造や用語を引用している。
The second purpose of this Specification and Guide is to provide a guide for a higher purity Tier of hydrogen peroxide for which a need has been identified
SEMI C44-0618 (technical revision)
) filter cartridges
C05600 - SEMI C56 - Specification for Dichlorosilane (SiH2Cl2) Revision:SEMI C56-0224 - Current chemically unreactiveThis Standard provides a series of specifications for different grades of dichlorosilane (SiH2Cl2) that are used in the semiconductor industry. This Specification covers requirements for all grades of dichlorosilane (SiH2Cl2) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline. Referenced SEMI Standards (purchase separately) SEMI C3. 18 Specification for Dichlorosilane (SiH2Cl2) in