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C00302 - SEMI C3.2 - Specification for Arsine (AsH3) in Cylinders, 99.94% Quality StdPbc-0624 The purpose of this Document

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Description

The purpose of this Document is to standardize requirements for 2-propanol used in the semiconductor industry and testing procedures to support those standards

The scope of this Document is all grades of tetraethylorthosilicate used in the semiconductor industry

originally published in 1990

on the other hand

The purpose of this document is to provide a specification for dichlorosilane (SiH2Cl2) used in the semiconductor industry

C00302 - SEMI C3.2 - Specification for Arsine (AsH3) in Cylinders, 99.94% Quality StdPbc-0624 The purpose of this DocumentThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published in 1992; previously published June 2011. The purpose of this Document is to provide specifications for arsine (AsH3) that is used in the semiconductor industry. This Document

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