C04700 - SEMI C47 - Guide for Trans 1,2 Dichloroethylene StdPbc-0913 SEMI 3D9 — Guide for

SEMI 3D9 — Guide for Describing Materials Properties for a 300 mm 3DS-IC Wafer Stack

SEMI C61-0707 (first published)

NOTICE: This Document was reapproved with minor editorial changes

本文書の目的は，半導体産業で使用されるトリメチルホスフィンに対する要求条件を標準化し，またこれらのスタンダードをサポートする試験手順を標準化することである。試験方法は，統計的に有効な結果を示している。

SEMI 3D8-1121 (technical revision)

C04700 - SEMI C47 - Guide for Trans 1,2 Dichloroethylene StdPbc-0913 SEMI 3D9 — Guide forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Standard is to provide a guide for a grade of trans 1,2 dichloroethylene for which a need has been identified. The scope of this Standard lists the proposed impurity limits of trans 1,2 dichloroethylene