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INAA is an NAA where the analysis is conducted directly on the irradiated samples
SEMI MF1390-0218 (Reapproved 1023)
SEMI M20-0704 (technical revision)
Recommendations for EPOC location
125 inch type surface mount gas distribution system
E07300 - SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps StdDcs-Replaced INAA is an NAA whereNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for dry pump (DRP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this standard when