F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing Revision:SEMI F17-95 (Withdrawn 0704) - Withdrawn Flatness metric is well-established therefore

Flatness metric is well-established therefore partial site flatness can be used as a process control tool as well as a material exchange specification for edge geometry

The roll-off amount (ROA) metric is suitable for quantifying near-edge geometry of wafers used in semiconductor device processing

SEMI 3D11 — Terminology for Through Glass Via and Blind Via in Glass Geometrical Metrology

the user must be specific in the selection of the tube and welded fitting s to be evaluated

The scope of this Document is limited to the apparent LER or LWR obtained by processing the two-dimensional image (signal intensity) of the observed line pattern

F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing Revision:SEMI F17-95 (Withdrawn 0704) - Withdrawn Flatness metric is well-established thereforeThis specification was technically reapproved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on October 25, 2002. Initially available at www. semi. org December 2002; to be published March 2003. Originally published in 1995. NOTICE: This document was balloted and approved for withdrawal in 2004. The purpose of this