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• Authentication of consistency of recipes in equipment with Recipe Server by providing an optional Pre-Execution Check mechanism
SEMI G41-87 (first published)
1 The purpose of this Specification is to define a standard equipment capability to report recipe step and process-related data to the factory system
本安全基準之目的係在設定半導體、FPD、PV製造及其他使用易燃性矽化合物製程設備之最低安全與衛生設計標準。
SEMI S1-0923a (delayed revision)
E10900 - SEMI E109 - レチクルおよびポッド管理に関する仕様(RPMS) StdPbc-1224 • Authentication of consistency ofGlobal Information & Control CommitteeNorth American Information & Control Committee20041210North American Regional Standards Committee20052www. semi. org2005320017200411 ReticleID AMHS ID Subordinate Document: SEMI E109. 1 0704 PODRPMSSEC II Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E15 Specification for Tool Load port SEMI E30 Generic Model for Communications and Control of SEMI
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