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As a reference for the creation of technology-specific object model definitions
help in equipment selection
SEMI E130-1104 (designation update)
incongruous
SEMI E1 — Specification for 3
E13400 - SEMI E134 - 데이터 수집 관리 사양 StdTpc-Automated Material Handling Systems As a reference for theInformation & Control Global Technical Committee , global Audits and Reviews Subcommittee 2013 6 4 . 2013 4 www. semiviews. org www. semi. org ; 2004 7 ; 2013 3 . ad hoc , (method) . (data source) (enabling) (disabling) , consumer . (event), (exception) (Trace Data) . , . (behavior) . . (activities) consumer . . Referenced SEMI Standards SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E40 Standard for
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