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Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting Ingestion-build-205840 which contains at least one1 Scope This document specifies a method for the evaluation of thickness, density and interface width of single layer and multi layered thin films which have thicknesses between approximately 1 nm and 1 m, on flat substrates, by means of X Ray Reflectometry (XRR). This method uses a monochromatic, collimated beam, scanning either an angle or a scattering vector. Similar considerations apply to the case of a convergent beam with parallel data