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PV09200 - SEMI PV92 - Test Method for Extension of Flexible Thin Film Photovoltaic (PV) Modules StdPbc-0118 本仕様は, CMOS大規模集積回路(LSI: large scale integrated

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Description

本仕様は, CMOS大規模集積回路(LSI: large scale integrated circuit)デバイス用の薄膜シリコン・オン・インシュレーター(SOI: silicon-on-insulator)ウェーハの要求条件を規定するものである。本仕様は,130nm技術ノード以降(65nm,45nm等)のLSI用200mmおよび300mmウェーハを対象としている。150mmウェーハの場合には,旧来のLSI世代も含まれる。パラメータ,検査手順および受入基準を規定することにより,サプライヤと顧客双方が,製品の特性および品質要求条件を一貫して定義するのがよい。

This method can also be used for other applications outside of microelectronics

This Document accomplishes this by defining an operational model for AMHS SEM equipment as viewed by a factory automation controller (Host)

This Guide provides the user with information about containers needed to ship thin wafers that are mounted on dicing tape to tape frames conforming to either SEMI G74 or SEMI G87

3  This Guide lists the impurities typically found in polycrystalline silicon

PV09200 - SEMI PV92 - Test Method for Extension of Flexible Thin Film Photovoltaic (PV) Modules StdPbc-0118 本仕様は, CMOS大規模集積回路(LSI: large scale integratedThis Standard provides a test method to assess extension performance of flexible thin film photovoltaic (PV) module. This Standard specifies apparatus, specimens, test procedures, requirements and test report of tensile test for flexible thin film PV modules. This Standard is applicable only for flexible thin film PV modules. Referenced SEMI Standards None.

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