Vacuum technology. Standard methods for measuring vacuum-pump performance - Turbomolecular vacuum pumps Ingestion-build-264231 In particular the data contained

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Vacuum technology. Standard methods for measuring vacuum-pump performance - Turbomolecular vacuum pumps Ingestion-build-264231 In particular the data contained1 Scope This document, in conjunction with ISO 213601, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those with mechanical or magnetic bearings; with or without an additional drag stage(s) or other pumping stages on the shaft; with one or more inlet ports. Since turbomolecular vacuum pumps are backed by primary