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SEMI E1 — Specification for Open Plastic and Metal Wafer Carriers
SEMI E39-1218 (Reapproved 0124)
SEMI E40-1102 (technical revision)
SEMI E99-1104E (Reapproved 0710)
SEMI E78-0706 (technical revision)
E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) StdPbc-1025 SEMI E1 — Specification forThis Standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of IBSEM equipment into an automated (e. g., semiconductor fabrication and flat panel display)
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