C00353 - SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality StdTpc-Silicon This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17

The user is referred to product labels

5  The metrology examples provided in this Guide originated from industry experts and are believed to be representative of tool performance as of the year 2012

本文書の目的は，半導体産業で使用されるジメチルスルホキシドに対する要求事項を標準化し，また，要求事項に対して立証するためのテスト手順を標準化することである。このテスト方法は統計的に有効な結果を表すことが明らかとなっている。

In the case of the guidelines

C00353 - SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality StdTpc-Silicon This edition was approved forThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1995. NOTICE: This Document was balloted and approved for withdrawal in 2001. Trifluoromethane (CHF3) is a colorless, nonflammable, noncorrosive gas with a slight ethereal odor. It is shipped in cylinders as a liquefied gas under its own vapor pressure. Referenced SEMI Standards None.