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• shoulder radii
これらの寸法は，主として
This Standard utilizes SEMI E37/SEMI E37
• Authentication of consistency of recipes in equipment with Recipe Server by providing an optional Pre-Execution Check mechanism
This standard was technically approved by the global Facilities Committee
E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard StdTpc-Device Tracking • shoulder radiiThe purpose of this Standard is to ensure minimum necessary level of physical connectivity between the transport module and process modules comprising the cluster tool for 450 mm. It is expected that a process module can be connected to the transport module of any cluster tool with least design change provided that both modules meet the requirement of this Standard. Process modules accept wafers at locations that may vary substantially from one module